| 摘要 |
PURPOSE:To perform high-speed processing through reducing the capacity of a bit memory by irradiating a sample surface with linearly focusing light from a light source, by detecting its reflected light by a group of photodetecting elements arrayed linearly, and by outputting a pattern reading signal from each element to a two- dimensional bit memory. CONSTITUTION:Light from a laser beam source 1 is focused linearly through a lens system 21 and then scanned 2 optically, and a pattern 5 on a sample surface 4 is irradiated with the light via a lens 3. Then, the reflected light from the surface 4 passes through the lens 3 and a scanner 2 to form its image through aligning the linear direction of a picture on a photodetector 22, in which the plural photodetecting elements are linearly arranged. Respective output signals of the photodetecting element group of the detector 22 are binary-coded by a preprocessor, whose outputs are inputted to a two-dimensional bit memory 24 in parallel. Consequently, a memory for a pipeline used conventionally for the parallel arithmetic processing of pattern data is unnecessary and while the capacity of the two-dimensional bit memory is reduced, the processing is speeded. |
