| 摘要 |
<p>Method of obtg. hollows of circular contour in monocrystals of intermetallic cpds. crystalline in the face centred cubic system is described. The principal surface of the body is covered with a masking film and a window is opened in the mask, through which the body is etched. Specifically the principal surface is in a (100)plane, and the window is cut in the shape of a regular polygon so that first and second consecutive sides each make an angle alpha with a direction of the family (011) equal to pi/n where n is the no. of skin of the polygon. Pref. the polygon is and octagon and the angle alpha is pi/8. The under etching which is prior art caused etching through a circular mask to give irregular shapes, esp. elliptical is here tunnel to advantage in that the angles disappear giving a circular aperture after etching.</p> |
