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发明名称
MOLECULAR BEAM CELL SHUTTER OF MOLECULAR BEAM EPITAXIAL GROWTH DEVICE
摘要
申请公布号
JPH01305891(A)
申请公布日期
1989.12.11
申请号
JP19880134504
申请日期
1988.06.02
申请人
SUMITOMO ELECTRIC IND LTD
发明人
ZENNO YOSHIAKI;TAKAGISHI SHIGENORI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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