| 摘要 |
PURPOSE:To increase the strength of a structure and to make the replacement thereof efficient by providing a device wherein a cold cathode is compressed into a holder made of a metal having a high heat conductivity at one end of the discharge tube so that it can be detached freely. CONSTITUTION:Ti, Ta, W, Mo, and the like which are resistive to ion sputtering and have high melting points are used for the cold cathode 8. Ti can be readily machined, its cost is inexpensive, and it is suitable. The cooling holder 10 which is made of the metal having high heat conductivity is fixed to inner laser tube 11 via an O ring 12, and to an outer laser tube 14 via an O ring 13. A cold cathode holder 7 is compressed or screwed into the tip of the cooling holder 10, and the replacement is facilitated. Cooling water 15 is sealed in the space between the tubes 11 and 14, and the heating of the inside of the tube 11 and the holder 10 are cooled. In this constitution, since there is no fused part between the inner glass tube and the outer tube, the replacement is easy. The structure of the holder is simple, and the electrical connection is obtained by contact, and the very effective device can be obtained. |
