PNEUMATIC GROSS LEAK DETECTOR

摘要

A pneumatic gross leak tester which will detect pressure difference between a hermatically sealed micor-electronic device and a gross leak micro-electronic device. The micro-electronic device is sealed in a metallic package. The lid is electrostatic welded to the base of the package. A gross leak is usually found between the lid and the base of the package. When a gross leak is detected, the package can be welded again, and then tested again for a gross leak.