发明名称 |
Vacuum gauge |
摘要 |
A hot filament ionization gauge is provided with a very small diameter and/or very short collector to limit interception of X-ray flux. Suitable gauge sensitivity is achieved by additionally collecting ions at the collector support, which is shielded from the X-ray flux by a shield. Collection of ions by the shield is avoided by maintaining the shield at grid potential.
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申请公布号 |
US4307323(A) |
申请公布日期 |
1981.12.22 |
申请号 |
US19800137461 |
申请日期 |
1980.04.04 |
申请人 |
GRANVILLE-PHILLIPS COMPANY |
发明人 |
BILLS, DANIEL G.;ARNOLD, PAUL C. |
分类号 |
H01J41/04;(IPC1-7):H05B31/26 |
主分类号 |
H01J41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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