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发明名称
MANUFACTURE OF SEMICONDUCTOR MEMORY
摘要
申请公布号
JPH0750345(A)
申请公布日期
1995.02.21
申请号
JP19940135354
申请日期
1994.06.17
申请人
TOSHIBA CORP
发明人
MASUOKA FUJIO
分类号
H01L21/28;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L21/824
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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