| 摘要 |
PURPOSE:To remarkably improve the cooling efficiency of a light emitting element by disposing a closed tube for containing a semiconductor substrate and a furnace for heating approximately vertically. CONSTITUTION:A furnace 3 and a quartz closed tube 2 are disposed approximately vertically. The tube 2 is allowed to stand for a predetermined time at a part of heat equalizing tube 4 secured into the furnace 3 for diffusion. Then, a wire 8 is loosened, the cooler of the tube 2 is dipped in cooling water 7 in a tank 9 for a predetermined time, and the tank 9 is finally moved to remove the tube 2. This construction can efficiently cool the cooling part uniformly and concentrically, thereby condensing the vapor of diffusion source to one point. |
