| 摘要 |
PURPOSE:To replace the plurality of the wafers turned back to back each other in a good efficiency without being flawed by a method wherein baskets are arranged on both sides of a container adapted rotatable, the wafers pushed up being held at the predetermined intervals and transferred. CONSTITUTION:The container 3 in which, for example, 24 sheets of the wafers are housed in placed on a revolving bed, and the baskets 7, 8 are disposed on holders 5, 6 on both sides of the container. Then, pushing-up pushers 9A, 9B are operated to push up the 6 sheets of the wafers 4 located at the position shown by a dotted line in the container 3, and the wafers 4 are carried by a cramp 12 of a carrying means 11 and moved onto the basket 7 to be replaced. Likewise, the wafers at the position of a one dot-chain line are transferred to the basket 8. Then, the container 3 is turned by 180 deg. (at this time, the position of the pusher is shifted by 3 pitches), and further, the wafers of 6 sheets each are transferred to the baskets, 7, 8. Thus, the replacements of the wafers turned back to back each other can be practiced in a short period of time without making cracks on the wafers. |
