Method of making a thin film.

摘要

A method of making a thin film by vapor depositing a source material onto a substrate, in which a mask plate is provided between the source material and the substrate at a location such that d < 5 l in which d denotes a space between the mask plate and the substrate and l denotes a mean free path of evaporated particles, or s < l in which s denotes a space between the mask plate and the source material. The mask plate moves relatively to the substrate and/or the source material during the deposition. The configuration of the mask plate is arranged so as to equalize deposition rates through the above-mentioned movement.