| 摘要 |
<p>PURPOSE:To prevent the exfoliation of a metallic thin film pattern formed on a surface of a glass substrate by implanting ions of an electrically conductive substance to make the surface conductive. CONSTITUTION:Ions of an electrically conductive substance such as antimony are implanted 5 in the whole surface or a necessary part of a glass substrate 1 with a metallic thin film pattern 2 formed. By the ion implantation an electrically conductive layer 3 is formed on a part not covered with the pattern 2, and this layer 3 is combined with the pattern 2 to make the whole surface of the substrate 1 electrically conductive. Accordingly, pattern exfoliating phenomenon due to the influence of concn. of static electricity or the like can be prevented by relieving the concn., and since metallic atoms existing on the boundary between the pattern 2 and the substrate 1 are forced into the substrate 1 by the ion implantation at the part of the pattern 2, a mixed layer 4 of metal and glass is formed to increase the adhesion of the pattern 2 to the substrate 1.</p> |
