| 摘要 |
<p>PURPOSE:To obtain the thin-film thermal head which is inexpensive and highly reliable by providing a heating resistor film and an electrode film on an insulated substrate and by providing further on the surface thereof an anti-abrasive protection film prepared by laminating specified layers. CONSTITUTION:On the insulated substrate 11 are provided the heating resistor film 12 and the electrode film 13 making electrification to the former. Further on the surface thereof is provided the anti-abrasive protection film 14 whose main constituent is a compound shown by the formula I (where x, y, z are the ratio of constituents; xnot equal to 0, ynot equal to 0, znot equal to 0) and the value of x/y is changed consecutively in the direction of thickness in such a manner that the value of x/y grows sequentially. In the aforesaid anti-abrasive protection film 14, the surface part thereof, for instance, has a composition shown by the formula II and, the composition being changed consecutively, the part contacting with the film 12 has a composition shown by the formula III. The protection film thus composed is obtained by using a spattering device having a Ta2O5 target and an SiO2 target and being capable of controlling respective spattering speed independently and by changing the ratio of the spattering speed consecutively.</p> |
