| 摘要 |
PROBLEM TO BE SOLVED: To enable easy saving of inker at a suitable position, even by an unskilled worker. SOLUTION: A marking device for a prober of a semiconductor wafer marks a chip T, decided as being a defective chip of the wafer 11. The making device comprises a trestle 30 fixed to the prober, a moving unit 31 slidable in X-Y direction in rectangular coordinates with respect to the trestle 30, the inker 35 mounted adjustably in height at the unit 31, a joy stick 41 for moving the unit 31 in the X-Y direction, and a height adjusting screw (h) for changing in height the inker 35 to the unit 31. The device further comprises pulse encoders 51, 52a, and 52b for detecting moving amounts in the X-Y direction, and a pulse encoder 80 for detecting the height. In this case, detected values of the encoders 51, 52a, 52b and the encoder 80 by operating the stick 41 and the screw (h) are displayed with digital values.
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