| 摘要 |
PURPOSE:To prevent the splash during vapor deposition by increasing an amount of a boat current more than that of a general vapor deposition current during a preheating period of the vacuum deposition boat to preliminarily evaporate impurities contained in a vapor deposition substance. CONSTITUTION:While a shutter is closed, a current of the vapor deposition boat is gradually raised to a value about 10-20% higher than that of a general vapor deposition current. After said current value is held for a difinite time, it is lowered to the general current value and, thereafter, the shutter 4 is opened to initiate the vapor deposition. |
