| 摘要 |
PURPOSE:To perform high-speed and high-accuracy position controlling by so connecting a moving part including an optical system in a driving device and its correcting load in a manner as to be included in a mechanically closed loop thereby making it possible to take static balance while they are at rest. CONSTITUTION:The 1st moving body consisting of an optical system 19 and a supporting body 23 and a correcting load 26 to serve as the 2nd moving body are connected by a connecting means in such a manner as to constitute a mechanical closed loop, and these move in their respective moving routes. These are so arranged that, if the angle that the moving route for the 1st moving body assumes to a horizontal direction is defined as theta, static balance can be taken between the moving part where the mass including the optical system 19 is M and the correcting load 26 of mass Msintheta to serve as the 2nd moving body while they are at rest and therefore the position controlling of high speed, high accuracy and high reliability is performed on account of the feasibility of using a servo motor or pulse motor as a driving source for driving. |
