发明名称 SUBSTRATE PREPARATION USING STABILIZED FLUID SOLUTIONS AND METHODS FOR MAKING STABLE FLUID SOLUTIONS
摘要 A method for making a solution for use in preparing a surface of a substrate is provided. The method includes providing a continuous medium that adds a polymer material to the continuous medium. A fatty acid is adding to the continuous medium having the polymer material, and the polymer material defines a physical network that exerts forces in the solution that overcome buoyancy forces experienced by the fatty acid, thus preventing the fatty acids from moving within the solution until a yield stress of the polymer material is exceeded by an applied agitation. The applied agitation is from transporting the solution from a container to a preparation station that applies the solution to the surface of the substrate.
申请公布号 WO2007078955(A3) 申请公布日期 2008.02.07
申请号 WO2006US48548 申请日期 2006.12.18
申请人 LAM RESEARCH CORPORATION;FREER, ERIK, M.;DE LARIOS, JOHN, M.;RAVKIN, MICHAEL;KOROLIK, MIKHAIL;MIKHAYLICHENKO, KATRINA;REDEKER, FRED, C. 发明人 FREER, ERIK, M.;DE LARIOS, JOHN, M.;RAVKIN, MICHAEL;KOROLIK, MIKHAIL;MIKHAYLICHENKO, KATRINA;REDEKER, FRED, C.
分类号 C11D7/32 主分类号 C11D7/32
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