申请人 |
LAM RESEARCH CORPORATION;FREER, ERIK, M.;DE LARIOS, JOHN, M.;RAVKIN, MICHAEL;KOROLIK, MIKHAIL;MIKHAYLICHENKO, KATRINA;REDEKER, FRED, C. |
发明人 |
FREER, ERIK, M.;DE LARIOS, JOHN, M.;RAVKIN, MICHAEL;KOROLIK, MIKHAIL;MIKHAYLICHENKO, KATRINA;REDEKER, FRED, C. |