TREATMENT OF EXHAUST GAS AND FLUIDIZED BED TYPE ADSORPTION TOWER USED FOR TREATMENT THEREOF

摘要

PURPOSE:To prevent the clogging of a gas purification cylinder and a filter and to efficiently treat exhaust gas by passing exhaust gas discharged from a reaction furnace through a scrubber and thereafter passing it through a fluidized bed type adsorption tower in which a purifying agent is floated and removing adhesive substance included in the exhaust gas. CONSTITUTION:Exhaust gas contg. harmful gas such as dischlorosilane discharged from a reaction furnace 1 in a semiconductor manufacturing factory is sucked with a vacuum pump 3 and introduced into a trickle-type scrubber 2 and harmful gas is removed by acting an alkali soln. or the like. Then the exhaust gas incorporating both nonreactive gas incapable of treating in the scrubber and adhesive substance formed in the scrubber is introduced into a fluidized bed type adsorption tower 6 in which a purifying agent such as activated carbon is floated via a pipe 5 and the adhesive substance is adsorbed and removed. Then the exhaust gas is introduced into a gas purification cylinder 9 encapsulated with the purifying agent and the residual harmful substance is throughly made harmless and treated.