| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-sensitivity spectrometer with high spatial and time resolution, and also to provide its method. SOLUTION: A group of light beams (also called object beam) such as scattered light and transmitted light radially emitted in various directions from one bright spot on a measuring object S, enter an objective lens 12, pass therethrough, and then arrive at a fixed mirror part 15 and a movable mirror part 16 of a phase shifter 14. The rays are reflected by the mirror parts 15 and 16, respectively, and then form an interference figure on an imaging surface of a detection part 24 through an image-forming lens 22. Moving the mirror part 16 in such a state, gradually changes the intensity of interference light on the imaging surface of the detection part, providing a waveform of an imaging intensity change (interference light intensity change) called an interferogram. By Fourier-transforming this interferogram spectral characteristics are acquired which are the wavelength-by-wavelength relative intensities of the light emitted from the one bright spot on the measuring object S. COPYRIGHT: (C)2009,JPO&INPIT
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