摘要 |
PURPOSE:To increase the resolution and sensitivity of a photoelectric converter by forming a long sized light receiving surface by long sized primary photoelectric converter, a scanning circuit and a matrix wiring unit. CONSTITUTION:A photoelectric converter 601, a charge storage unit 602, a selective amplifier 603, a matrix wire unit, a signal input and output unit, and a power supply electrode are formed on a substrate. The photoelectric converter 601 has a transparent conductive evaporation film 605 incident with light passed through a transparent electrode 600, a shielding electrode evaporation film 607 for averaging picture element shape, and a-Si photoconductor 606. The charge storage unit 602 has a capacitor formed between an evaporation thin film 618 and agrounding electrode 609. The potential produced by the charge stored in the charge storage unit 602 is supplied to the gate of the amplifying thin film transistor 612. |