| 摘要 |
PURPOSE:To minimize contamination by the impurities in a gaseous pressure medium and reduce the cost by enclosing the object to be treated with a heat-resistant cylinder which is tightly closed in the upper part. CONSTITUTION:The gaseous pressure medium supplied through a gas supply port 10 into a high-pressure chamber 8 passes between a high-pressure cylinder 1a and a heat insulating outer layer 2, and flows into a furnace chamber 3 from its lower part; at the same time, it passes the opening 6 of a heat-resistant cylinder 5 and flows into the cyliner. The gas supplied into the chamber 3 is heated by a heater 9, and the heat-resistant cylinder 5 is also heated simultaneously, so that the convections of the gaseous pressure medium inside and out of the cylinder occur respectively independently. Arragement is so made that the gas flows inside and out of the cylinder do not occur substantially, therefore the upper part of the heat-resistant cylinder is tightly closed. Hence, the gaseous pressure medium contacting the object 4 to be treated while its is treated is only the gas initially flowed into the cylinder 5, and the impurities in the gaseous pressure medium reacting with the object 4 are only those contained in the gaseous pressure medium in the cylinder, whereby the extent of contamination by the impurities of the object 4 is minimized. |
