| 摘要 |
PURPOSE:To convey an object to be treated of a different thickness, by controlling the gap of a seal according the thickness of the object detected on the upstream side of the slit seal. CONSTITUTION:A flexible object F to be treated fed from a delivery shaft 8 is passed through a guide roll 9 to an upstream side preliminary vacuum chamber 2. The thickness of this object F is measured by a thickness detecting means 18 provided at the inlet of the chamber 2. The detected signal is sent to a controlling means 19 and used to operate a stepping motor 16, whereby a seal block 15 supported by an upper case 13 through a ball screw 17, a nut 20 and a column 21 is moved vertically to adjust the slit formed between a lower case 14 and the block 15. The object F is passed through this slit, a guide roll 25 and 26 and a vacuum chamber 2 to a vacuum treatment chamber 1, where it is subjected to plasma treatment, passed through a downstream side vacuum chamber 3 which is similar in structure to the preliminary vacuum chamber 2, and a guide roll 10 and wound around a winding shaft 11. |
