| 摘要 |
PURPOSE:To facilitate the correspondence of a drawing attitude and the correction results of a proximity effect and draw a minute pattern by a method wherein the drawing attitude is drawn and displayed independently of drawing action, and a drawing picture is displayed and recorded for the desired time. CONSTITUTION:Preferably, a drawing attitude (the direction, line intervals, drawing line speed, etc.) is changed according to the proximity conditions of patterns and the conditions of surrounding patterns in order to correct a proximity effect and obtain a right pattern picture. Since the proximity effect is complicate by the mutual action of the patterns, drawing results are collated with the drawing attitude based on drawing information, and must be corrected separately. Thus, a display circuit 14 with a refresh memory corresponding to a TV picture is attached to a drawing device, and the drawing information of the desired pattern from a small-sized computer 13 is converted and supplied to a microcomputer 15 with a memory of 16KB controlling the TV display circuit 14. According to this constitution, the vector scanning direction is displayed by TV, the relationship of the generating condition of the proximity effect and the scanning direction is grasped, and the design of correction is facilitated. |
