SEMICONDUCTOR PELLET PICKUP DEVICE

摘要

PURPOSE:To arrange so that pellets may cause edge cracking or pressure breakdown by supporting the pellets flexibly at the lower part of the pellets and reducing a contact stress between a suction nozzle and a pellet with the help of a spot faced hole. CONSTITUTION:An optional pellet 1 to be sucked by a cassette ring 4 is caused to shift toward the lower part of a suction nozzle 2 and then the nozzle 2 arranged on a backup holder 5 is caused to descend to come in contact with the pellet 1, so that the nozzle sucks the pellet. In this case, because of the existence of the spot-faced hole, it suports the pellet 1 flexibly by the lower part of the pellet 1 when the sheet extends toward the hole 6 and a contact stress between the nozzle and the pellet 1 is eased by the spot-faced hole 6.