| 摘要 |
PURPOSE:To make it possible for a scanning electronic microscope to store the picture image in memory and call out the desired part thereof for observation. CONSTITUTION:A region 43 is scanned 42 by primary electronic beam 41 to detect and amplify the reflective electrons or secondary electrons 44 and generate identification signals 46 of flatness and nonflatness. On the other hand A/D conversion 47 is performed. Upon receipt of the scanning signals 42, address signals 48 corresponding to the incoming point of the beam 41 are generated to be input to a central processing unit 49 and the pattern interface informations 46 and the picture image informations 47 of the region 43 are respectively stored in memory 50, 51. Then the memory 51 is read out and after D/A conversion the picture image is displayed on the monitor 53. Then a desired portion in the pattern is designated by a Joystick device 54 and the address informations of the designated portion are read out 54 to obtain the pattern interface informations from the memory 50. When the address of the picture image is outside the selected pattern, a blanking 55 is applied to the monitor. In the case of erasion the blanking 55 is operated reversely. |
