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发明名称
摘要
申请公布号	JPS5639542(B2)	申请公布日期	1981.09.14
申请号	JP19750004961	申请日期	1975.01.10
申请人		发明人
分类号	H01L21/301;H01L21/302;H01L21/306;H01L21/329;H01L21/331;H01L29/06;H01L29/73;H01L29/74	主分类号	H01L21/301
代理机构		代理人
主权项
地址

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