| 摘要 |
PURPOSE:To manufacture a thin-film superconductor having a superconductive transition temp. close to that of ceramics, by using a material prepared by further adding Cu to a rare earth-Ba-Cu-O-type sintered compact as a target material. CONSTITUTION:As a target material for sputtering, a material prepared by subjecting a sintered compact of superconductor having a composition represented by MBa2Cu3O7-x to Cu addition by using copper piece or copper powder is used. In the above composition of the sintered compact, M means one or more elements among Y, Lu, Yb, Tm, Er, Ho, Dy, Gd, and Sc. It is desirable to use a material in which fine-grained copper powder of <=1mm grain size is dispersed in the 10-30% of the sintered compact surface as a target material. By this method, thin-film superconductor devices including the devices utilizing Josephson effect can be manufactured. |
