| 摘要 |
PURPOSE:To improve detection sensitivity by providing dielectric layers between a stationary electrode plate and movable electrode plate which are aligned and disposed with plural slit electrodes on the surfaces. CONSTITUTION:Dielectric layers 26, 28 of ''Teflon '' or the like are provided on the surfaces of the slit electrodes 14a of a movable electrode plate 14 and the slit electrodes 12a of a stationary electrode plate 12. When the plate 14 moves, the capacities between the electrodes 14a and the electrodes 12a change and the extent of the movement of the plate 14 is detected by electrically detecting the changes thereof. |
