发明名称 |
Cryopumping apparatus |
摘要 |
A cryopump consisting of cryopanels attached to an elongated source of refrigeration in which heat is transferred from cryopumping surfaces to various stages of refrigeration by conduction including a chevron baffle or louver mounted parallel to the long axis of the refrigerator source and directly to the warmest stage of refrigeration.
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申请公布号 |
US4277951(A) |
申请公布日期 |
1981.07.14 |
申请号 |
US19800139032 |
申请日期 |
1980.04.10 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
LONGSWORTH, RALPH C. |
分类号 |
F04B37/08;(IPC1-7):B01D8/00 |
主分类号 |
F04B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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