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发明名称
PHOTORESIST COMPOSITIONS
摘要
申请公布号
EP0026088(A3)
申请公布日期
1981.07.08
申请号
EP19800303280
申请日期
1980.09.18
申请人
JAPAN SYNTHETIC RUBBER CO., LTD.
发明人
KAMOSHIDA, YOICHI;YOSHIHARA, TOSHIAKI;HARITA, YOSHIYUKI;HARADA, KUNIHIRO
分类号
G03F7/09;(IPC1-7):G03C1/71;G03C1/70;G03F7/10
主分类号
G03F7/09
代理机构
代理人
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