| 摘要 |
PURPOSE:To avoid the deterioration of the properties of a semiconductor device by coating a getter agent on the projected end of a metallic plate forming a pill-prong type package for adsorbing impurity gas in the package produced at the time of its projection welding. CONSTITUTION:An anode electrode 1 is inserted into the lower end of a cylindrical ceramic material 2 forming a pill-prong type package 8, and a mesa type semiconductor pellet 4 using GaAs or the like is secured to the upper end thereof. Subsquently, an annular metallic plate 3 is bonded with the peripheral edge externally projected to the upper end of the ceramic material 2, an electrode 5 provided at the pellet 4 is bonded using a fine wire 6 thereto, and the upper open end is covered with a cathode electrode 7. With this configuration getter agent 9 containing mainly silicone resin is coated on the inner periphery of the hole facing the plate 3. Thus, impurity gas produced upon fixing of the electrode 7 to the plate 3 by projection welding is adsorbed to the getter agent 9, thereby eliminating the deterioration of the properties of the semiconductor device. |
