METHOD OF PRODUCING IRON OXIDE PHOTOMASKS

摘要

Method of producing photomasks of X-ray amorphous iron oxide (Fe2O3) by spraying a transparent substrate at a temperature between 180 DEG and 250 DEG C. with a solution of an hydrolysable iron salt in a polar organic solution or, in accordance with a variant of this method, at a temperature between 180 DEG and 750 DEG C. with a solution of a hydrolysable iron salt which also contains a salt of a metal having a greater ion diameter. If temperatures above approximately 230 DEG C. are used, the solvent may in the latter case also consist of water only.