| 摘要 |
PURPOSE:To always arrange a substrate the same direction by rotating the conveying and positioning member of a substrate accommadating container by a rotary driving device by the command in discriminator for the abverse and reverse sides of a semiconductor substrate wherein the container is fed corresponding to the result of discrimination for the obverse or reverse side. CONSTITUTION:A motor 9 is stopped revolution for positioning on a belt 6 when an accommodating container 2 housing a semiconductor substrate 1 is loaded on a belt 11 for feeding in an A direction and arrives at the belt 6 engaged with a rotary base 4. Next, the container 2 is faced in the direction of a discriminator 13 detecting the obverse and the reverse sides of the substrate by a motor 5. And the container is turned 90 deg. in the direction of D or E by the command and the direction depends on the discriminated side 1b, obverse or reverse side. Then, the turn is stopped to convey the container to the next process in an F direction by loading the container on the belts 6, 12. In this way, a setting mistake to the container will be eliminated and dust generation caused by manpower work will be reduced to attempt power saving. |
