| 摘要 |
PURPOSE:To minimize the effect of the dark current generated by heat in the peripheral circuit in a charge-coupled element by providing a metal electrode between the charge-coupled element and the peripheral circuit necessary for driving said charge-coupled element which have been formed on the same substrate. CONSTITUTION:Between the charge-coupled element 1 and the output amplifier 2, and the peripheral circuit 3 necessary for driving said charge-coupled device which have been formed on one Si substrate, a metal electrode 40 of Al or the like which has comparatively excellent thermal conductivity is provided. The heat generated in the peripheral circuit 3 propagates through the Si substrate and reaches the metal electrode 40. Because the thermal conductivity of the metal electrode 40 is larger than the Si substrate, the metal electrode 40 functions as a radiator. At the same time, it diffuses the heat conducted from the peripheral circuit 3 in the transfer channel direction of the charge-transfer device 1. Therefore, the temperature distribution in the transfer channel direction is made uniform, so that the effect of the dark current is eliminated. |
