摘要 |
PURPOSE:To form a metalback film with uniform film thickness distribution by arranging a screening body with mesh structure between an evaporation source and a glass panel and vacuum-depositing it. CONSTITUTION:A coil-shaped heater 10 for which an aluminum rod 11 is charged is located almost on the central line of a glass panel 1. The mesh structure, or a mosaic-shaped screening body 13 is arranged between this coil-shaped heater 10 and the glass panel 1. The aperture ratio of this screening body 13 is designed to gradually increase toward its periphery from the center. The screening body 13 is arranged so that the central line of the glass panel 1 can pass through this central point. |