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发明名称
摘要
申请公布号
JPS5626979(B2)
申请公布日期
1981.06.22
申请号
JP19750042327
申请日期
1975.04.09
申请人
发明人
分类号
H01L29/73;H01L21/312;H01L21/331;H01L29/08;H01L29/861
主分类号
H01L29/73
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代理人
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