PROCESS AND APPARATUS FOR CLEANING WALL DEPOSITS FROM A FILM DEPOSITION FURNACE TUBE.,申请号EP19800900181-传众专利搜索

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发明名称	PROCESS AND APPARATUS FOR CLEANING WALL DEPOSITS FROM A FILM DEPOSITION FURNACE TUBE.
摘要
申请公布号	EP0020746(A4)	申请公布日期	1981.06.16
申请号	EP19800900181	申请日期	1980.07.14
申请人	NCR CORPORATION	发明人	ROMANO-MORAN, ROBERTO
分类号	C23C16/44;H01J37/32;H01L21/205;H01L21/31;(IPC1-7):B08B7/00;B08B9/00;H01J17/22	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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