发明名称 FIELD EMISSION CATHODE AND ITS MANUFACTURE
摘要 <p>PURPOSE:To take out large probe current stably by adsorbing a particular metal through oxygen within the depth of mono atomic layer on the surface of area where electrons are emitted from a needle cathode. CONSTITUTION:In a vacuum container ambient where the field emission can be performed, at least one metal selected from Cr, Al, Ce, Mg, Ti, Si is deposited on the surface of area where at least the electron is emitted from a needle electrode 1 with the depth approximately same with that of mono atomic layer. Thereafter proper amount of oxygen gas is provided into the vacuum ambient to adsorb the oxygen gas with the depth approximately same with that of monomolecular layer on the metallic monomolecular layer, then the oxygen gas is evacuated to return to the ambient where the field emission can be performed. Thereafter the needle cathode 1 is heated for 10-60sec under the temperature range of 1,300-1,500 deg.C.</p>
申请公布号 JPS5661733(A) 申请公布日期 1981.05.27
申请号 JP19790136410 申请日期 1979.10.24
申请人 HITACHI LTD 发明人 HOSOKI SHIGEYUKI;YAMAMOTO SATOHIKO;TODOKORO HIDEO;KAWASE SUSUMU;HIRAI YASUHARU
分类号 H01J9/02;H01J1/304 主分类号 H01J9/02
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