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发明名称
Halbleiterbauelement und Verfahren zu dessen Herstellung
摘要
申请公布号
DE1947334(A1)
申请公布日期
1970.03.26
申请号
DE19691947334
申请日期
1969.09.18
申请人
SONY CORP.
发明人
KOBAYASHI,ISAMU
分类号
C23C16/24;H01L21/00;H01L21/205;H01L21/3215;H01L21/763;H01L27/06;H01L29/00
主分类号
C23C16/24
代理机构
代理人
主权项
地址
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