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发明名称
DRAWING DEVICE FOR INTEGRATED CIRCUIT PATTERN
摘要
申请公布号
JPS5655297(A)
申请公布日期
1981.05.15
申请号
JP19770119058
申请日期
1977.10.05
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
GOTOU YUUJI
分类号
B43L13/00
主分类号
B43L13/00
代理机构
代理人
主权项
地址
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