| 摘要 |
PURPOSE:To provide an element of high density and long size in a simple process by forming light shielding walls and photocurrent take-out electrodes alternately on the surface of a transparent electrode and forming on them a hetero-junction over a long range. CONSTITUTION:Forming a metal layer 2 on the surface of a transparent substrate 1 and etching the layer 2, light shielding walls 3 and photocurrent take-out electrodes 4 are formed alternately. Parts where there is no wall 3 or electrode 4 pass light. As a result, the electrodes 4 are formed facing the parts which pass light. Next, a thin film 5 of a photoconductive material and further on it a thin film 6 of a material which forms a hetero-junction with an amorphous chalcogenide material and the photoconductive material are formed extending over a large area. On the thin film 6, an electrode 7 is formed. By so doing, light incident parts and nonincident parts can be formed very finely, therefore, the array of very fine photosensitive elements can be formed over a long range. In addition, the production process is simple; and since the elements are formed of thin films, their response is very fast. |
