SCANNING ELECTRON MICROSCOPE WITH EDDY-CURRENT COMPENSATION

摘要

In a scanning charged particle microprobe, such as a stereoscopic scanning electron microscope, a plurality of RC circuits for generating an exponentially decaying electrical signal are connected to an oscillator for generating a step function signal. The exponentially decaying signal and the step function signal are summed and applied to the microprobe to cause the beam of charged particles to deflect in a step function which has been compensated for the effects of eddy current induced fields.