| 发明名称 |
Semi-open liquid phase epitaxial growth system |
| 摘要 |
A semi-open method for growing an epitaxial layer on a substrate by increasing the pressure, refluxing the volatile components, contacting the substrate with the melt solution, and reducing the solution temperature.
|
| 申请公布号 |
US4263065(A) |
申请公布日期 |
1981.04.21 |
| 申请号 |
US19800132756 |
申请日期 |
1980.03.24 |
| 申请人 |
ROCKWELL INTERNATIONAL CORPORATION |
发明人 |
WANG, CHENG-CHI;VANDERWYCK, AUGUST H. B. |
| 分类号 |
C30B19/04;(IPC1-7):H01L21/20 |
主分类号 |
C30B19/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
