| 摘要 |
PURPOSE:To prevent entering of outside air at the time when loading and unloading a work, by attaching a magnet to one end of a bar for pushin and pull-out of a boat, and by putting the boat into and taking it out from a treatment preparing chamber by turning or shifting an annular magnet attached through a nonmagnetic cylinder. CONSTITUTION:After a joint 10 was closed, a sliding annular magnet 8S is shifted to the left to allow tip of a pull-out bar 9 to reach a boat 3. And then, a rotating annular magnet 8R is turned, and by turning of a magnet 7R a hook on tip of the bar is connected to a hanger 3H of the boat. After execution of displacing operation in a preparing chamber 5, the magnet 8S is further shifted to the left to move the boat to a prescribed position 3 in a reacting tube 2. By operating this procedure conversely the boat which has been treated is pulled out from the preparing chamber, and after conducting discharge of waste gas, etc. the joint 10 is opened to take out the boat 3. As movement of the boat is completely segregated from outside air except for the time when it is pushed into or pulled out from the preparing chamber 5, it is possible to prevent outside air from coming in and toxic gas from leaking out from the reacting tube, and therefore, it is possible to execute putin and take-out of a work safely. |
