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发明名称
HERSTELLUNG METALLISCHER DUENNSCHICHTSTRUKTUREN MIT SUBMIKROMETER-DIMENSIONEN
摘要
申请公布号
DD147740(A1)
申请公布日期
1981.04.15
申请号
DD19790217506
申请日期
1979.12.10
申请人
DUPARRE,MICHAEL,DD;REICHMANN,ALFRED,DD
发明人
DUPARRE,MICHAEL,DD;REICHMANN,ALFRED,DD
分类号
H01L21/28;H01L39/22;(IPC1-7):H01L39/22
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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