摘要 |
PURPOSE:To obtain a mass spectrum with high accuracy by compensating a modulating signal or phase and wave form of an output ion current from a mass analysis tube with mass of ions running to the mass analysis tube and signals corresponding to the energy. CONSTITUTION:A voltage corresponding to an applied voltage of an ion accelerating electrode in an ion source A is drawn from an ion source controlling circuit F, and input to a compensating circuit H as a signal P corresponding to the ion energy. A modulation signal R' compensated corresponding to the variation of the ion energy is drawn from the compensating circuit H to modulate the ion current, and a pulse ion current with a constant phase and wave form is drawn from a mass analysis tube independent of the fluctuation of the ion energy. |