| 摘要 |
PURPOSE:To obtain a high output with excellent linearity from the short-wave range to the long-wave range by varying an angle contained between a vapor flow and base normal line from a low angle to a high angle in step when vapor-depositing a ferromagnetic material on the base while moving a nonmagnetic base. CONSTITUTION:In the method of vapor-depositing ferromagnetic material 4 slantingly on filmlike base 5 by vaporing it by vapor generator 3 while evacuating vacuum tank 1 to fixed extent through exhauster 2, run guides 81-83 are provided between supply reel 6 and take-up roll 7 and three angles between straight-line planes and vertical planes formed between guides 81-83 and the roll are so set that theta1>theta2> theta3. A thus obtained magnetic thin film has relatively low coercive force at the lower and relatively high coercive force at the upper and has high coercive force on the whole. Consequently, a high output and excellent frequency characteristics can be obtained and the film growth speed and sticking efficiency improve. |
