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发明名称
摘要
申请公布号
JPS5615575(B2)
申请公布日期
1981.04.10
申请号
JP19730141295
申请日期
1973.12.19
申请人
发明人
分类号
H01L27/06;H01L21/76;H01L21/762;H01L21/822;H01L27/04;H01L29/74;H01L29/861
主分类号
H01L27/06
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