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发明名称
MARK SURFACE CLEANING DEVICE
摘要
申请公布号
JPH0982822(A)
申请公布日期
1997.03.28
申请号
JP19950257062
申请日期
1995.09.08
申请人
SONY CORP
发明人
MATSUMOTO HIROMI
分类号
H01L23/00;(IPC1-7):H01L23/00
主分类号
H01L23/00
代理机构
代理人
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地址
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