| 摘要 |
PURPOSE:To obtain an irreversible heat-sensitive recording material which has an amorphous silicon hydride layer containing a specified quantity of hydrogen and being in the state of high hydrogen concn. and which turns into the state of lower hydrogen concn., remaining amorphous, while charging the hue and optical or electrical property by the heat higher than the threshold value. CONSTITUTION:After a substrate 11 (ex. polyester film) is stuck tightly on to a substrate holder inside a chamber, the chamber is highly evacuated and the silane- argon gaseours mixture is introduced therein. Then, high-frequency electric power is applied to a grid opposed to the substrate holder and discharged, an irreversible heat-sensitive material layer 10 of amorphous silicon hydride in the stable condition of high hydrogen density constituted by silicon and others containing 10 atomic precent or more hydrogen is obtained on the substrate 11. An amt. of energy carresponding to the threshold value or more and ultimately in the form of heat is given to retain it in the amorphous state, thus a stable part 13C in the state of lower hydrogen density is obtained. This process is performed, for instance, by supplying voltage from a voltage source 14 to the part 13C between the electrode 12 and the substrate 11 through a conductor 15. |
