REACTIVE SPUTTERING METHODS AND APPARATUS,申请号GB19770046564-传众专利搜索

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发明名称	REACTIVE SPUTTERING METHODS AND APPARATUS
摘要
申请公布号	GB1586838(A)	申请公布日期	1981.03.25
申请号	GB19770046564	申请日期	1977.11.09
申请人	CEA	发明人
分类号	C23C14/00;C23C14/54;(IPC1-7):C23C15/00	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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